Ir. M.J. Kamerbeek
Ir. M.J. Kamerbeek
Publicaties
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2015
Pattern transfer into silicon using sub-10 nm masks made by electron beam induced deposition
M Scotuzzi / MJ Kamerbeek / A Goodyear / M Cooke / CW Hagen
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2015
Pattern transfer into silicon using sub-10 nm masks made by electron beam-induced deposition
M Scotuzzi / MJ Kamerbeek / A Goodyear / M Cooke / CW Hagen
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2009
Electron beam induced deposited etch masks
CTH Heerkens / MJ Kamerbeek / WF van Dorp / CW Hagen / J Hoekstra
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